Nanyang Xinda Electro-Mechanical Co., Ltd.
Nanyang Xinda Electro-Mechanical Co., Ltd.
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CE Approval Cvd Diamond Machine CVD Vacuum Tube Furnace,Gas Vacuum CVD Tube Machine Cvd Tube Furnace
Our CVD furnace is a splitable tube furnace with 50mm diameter quartz tube, dual hot zones, diffusion vacuum pump system and four channels mass flow meters gas flowing system. It can mix 1-4 types of gases for CVD or diffusion.
Production Display:
Technical Specification:
| Model | XDEM-1200CVD | ||
| Part I: Tube Furnace | |||
| Tube Furnace
| Display | LED | |
| Chamber | Split type and upper part can be opened | ||
| Max. Temperature | 1200℃ for short time | ||
| Continuous Woking Temp. | ≤1100℃ | ||
| Heating Rate | Suggestion: 0~10℃/min (max. 20℃/min) | ||
| Temperature Zone | 220+220mm dual zones | ||
| Heating Element | Resistance wire with Mo | ||
| Thermocouple | K type | ||
| Temperature Control Accuracy | ±1℃ | ||
| Tube Size | 50 x 1000mm (OD x minimum L) | ||
| Temperature Control | PID automatic control via SCR power control | ||
| Heating curves | 30 steps programmable | ||
| Vacuum Flange | Stainless Steel vacuum flange with valve
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| Power | 220V, 50 Hz, single phase at max. 3KW | ||
| Part II: Vacuum Pump | |||
| Rotary Vane Vacuum Pump+Vacuum pump accessories+Cart with wheel
| Ultimate vacuum 10-3 Torr. And vacuum inside the tube is around 10-1 Torr. Flow rate: 2L/S
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| Part III: Mass Flow Meters | |||
| Mass Flow Meters | Four precision mass flow meters : MFC 1: Gas flow range from 0~100 sccm MFC 2&3: Control range from 0~200 sccm MFC 4: Gas flow range from 0~500sccm (or according to your requriement) One gas mixing tank is installed on bottom case with valve 4 stainless steel needle valves is installed on left side of bottom case to control 4 type gases mixing manually
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| Part IV Inficon digital Vacuum Gauge | |||
| Inficon | 3.8x10-5 to 1125 Torr measurement range Anti-corrosive, gas-type independent
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Packing & Shipping:
Wooden box with polyfoam filled inside to ensure safe transportation.
Parcels can be sent by sea, by air, by express,etc per customer's request.